N. Q. Khánh et al: The effect of substrate bias on the piezoelectric properties of pulse DC magnetron sputtered AlN thin films

We have shown by Piezoresponse Force Microscopy (PFM) that the quality of the deposited AlN layer depends strongly on the negative substrate bias, i.e., the energy transferred via the bombardment of the accelerated positive ions on the sample.

November 13 2020: N. Q. Khánh et al: The effect of substrate bias on the piezoelectric properties of pulse DC magnetron sputtered AlN thin films published in Journal of Materials Science: Materials in Electronics 0957-4522 1573-482X

View on: MTMT: 31787835 | DOI: 10.1007/s10854-020-04810-9 | WoS: 000588873600002 | REAL: 118823 | Scopus: 85096023345 | Google scholar hash: b32mWr70w_IJ