Characterization of damage structure in ion implanted SiC using high photon energy synchrotron ellipsometry

Péter Petrik, Zsolt Zolnai, Olivér Polgár, Miklós Fried, Z Betyak, Emil Agócs, Tivadar Lohner, C Werner, M Röppischer, C Cobet

THIN SOLID FILMS 0040-6090
2011

View on: MTMT: 1619749 | DOI: 10.1016/j.tsf.2010.12.070 | WoS: 000289174200048 | Scopus: 79952616346 | Google scholar: 3062727595778195398