Orientation dependent growth of SiC nanocrystals at the SiO2/Si interface

Gábor Battistig

THIN SOLID FILMS 0040-6090
2012

View on: MTMT: 1751055 | DOI: 10.1016/j.tsf.2011.09.076 | WoS: 000300459200054 | Scopus: 84855979492