Resolving lateral and vertical structures by ellipsometry using wavelength range scan

Péter Petrik, Emil Agócs, János Volk, István Endre Lukács, Bálint Fodor, Péter Kozma, Tivadar Lohner, S Oh, Y Wakayama, T Nagata, Miklós Fried

THIN SOLID FILMS 0040-6090
2014

View on: MTMT: 2707977 | DOI: 10.1016/j.tsf.2014.02.008 | REAL: 13718 | WoS: 000346055200045 | Scopus: 84920706193 | Google scholar: 2751441688802875943