Determination of migration of ion-implanted Ar and Zn in silica by backscattering spectrometry

Edit Szilágyi, István Bányász, Endre Kótai, Attila Németh, Csaba Major, Miklós Fried, Gábor Battistig

RADIATION EFFECTS AND DEFECTS IN SOLIDS 1042-0150
2015

View on: MTMT: 2886545 | DOI: 10.1080/10420150.2015.1039534 | REAL: 31764 | WoS: 000359488500009 | Scopus: 84938556909 | Google scholar: 2239414587557694994