Homogeneous transparent conductive ZnO:Ga by ALD for large LED wafers

Zoltán Szabó, Zsófia Baji, Péter Basa, Zsolt Czigány, István Bársony, H-Y Wang, János Volk

APPLIED SURFACE SCIENCE 0169-4332 1873-5584
2016

View on: MTMT: 3075464 | DOI: 10.1016/j.apsusc.2016.04.081 | REAL: 36003 | WoS: 000376819300041 | Scopus: 84964562871 | Google scholar: 4929594082237377138