Wafer-scale SiC rich nano-coating layer by Ar+ and Xe+ ion mixing

Gábor Battistig, Sándor Gurbán, György Sáfrán, Attila Sulyok, Attila Németh, P Panjan, Zsolt Zolnai, Miklós Menyhárd

SURFACE AND COATINGS TECHNOLOGY 0257-8972 1879-3347
2016

View on: MTMT: 3089477 | DOI: 10.1016/j.surfcoat.2016.06.039 | REAL: 41923 | WoS: 000381838400037 | Scopus: 84975517644 | Google scholar: 402140005543720047