Intercomparison of ion beam analysis software for the simulation of backscattering spectra from two-dimensional structures

M Mayer, P Malinský, F Schiettekatte, Zsolt Zolnai

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 0168-583X 1872-9584
2016

View on: MTMT: 3112330 | DOI: 10.1016/j.nimb.2016.08.010 | REAL: 41919 | WoS: 000384872300010 | Scopus: 84988030680 | Egyéb URL: http://www.sciencedirect.com/science/article/pii/S0168583X16303561 | Google scholar: 7893366906754235390