Spectroellipsometric detection of silicon substrate damage caused by radiofrequency sputtering of niobium oxide

Tivadar Lohner, Miklós Serényi, Edit Szilágyi, Zsolt Zolnai, Zsolt Czigány, Khánh Nguyen Quoc, Péter Petrik, Miklós Fried

APPLIED SURFACE SCIENCE 0169-4332 1873-5584
2017

View on: MTMT: 3146254 | DOI: 10.1016/j.apsusc.2016.11.232 | REAL: 42657 | WoS: 000408756700058 | Scopus: 85008177089 | Google scholar: 3305940398116640901