Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films

Nikolett Hegedüs, Riku Lovics, Miklós Serényi, Zsolt Zolnai, Péter Petrik, Judith Mihály, Zsolt Fogarassy, Csaba Balázsi, Katalin Balázsi

COATINGS 2079-6412 2079-6412
2021

View on: MTMT: 31799021 | DOI: 10.3390/coatings11010054 | REAL: 119229 | WoS: 000610976100001 | Scopus: 85099663132 | Google scholar: 14993868981357139915