Novel precursor for the preparation of vanadium sulfide layers with atomic layer deposition

Zsófia Baji, Zsolt Fogarassy, Attila Sulyok, Zsolt Endre Horváth, Zoltán Szabó

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A-VACUUM SURFACES AND FILMS 0734-2101 1520-8559
2025

View on: MTMT: 35751036 | DOI: 10.1116/6.0004127 | REAL: 215861 | WoS: 001418763500002 | Scopus: 85217559266 | Google scholar: 1737744912038026868