Packaging of a 3-axial piezoresistive sensor with backside contacts
Tamás Kárpáti, Kulinyi S, Végvári R, Ferencz J, Nagy A, Andrea Edit Csikósné Pap, Gábor Battistig MICROSYSTEM TECHNOLOGIES 0946-7076 2014 View on: MTMT: 2248022 | DOI: 10.1007/s00542-013-1782-3 | REAL: 4630 | WoS: 000336375700003 | Scopus: 84901634499 | Google scholar: 15216662912741968750