Investigation of the Tetrakis(dimethylamino)hafnium and H2S ALD Process: Effects of Deposition Temperature and Annealing
Zsófia Baji, Zsolt Fogarassy, Attila Sulyok, Péter Petrik SOLIDS 2673-6497 2022 View on: MTMT: 33019972 | DOI: 10.3390/solids3020018 | REAL: 145058 | Google scholar: 14004257902817260618