A 3D-RBS study of irradiation-induced deformation and masking properties of ordered colloidal nanoparticulate masks
Zsolt Zolnai, András Deák, Norbert Nagy, Attila Lajos Tóth, Endre Kótai, Gábor Battistig NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 0168-583X 1872-9584 2010 View on: MTMT: 1312682 | DOI: 10.1016/j.nimb.2009.09.039 | WoS: 000272978600013 | Scopus: 71649110405 | Google scholar: 18436311534235825969