Determination of hydrogen concentration in a-Si and a-Ge layers by elastic recoil detection analysis
Khánh Nguyen Quoc, Miklós Serényi, Attila Csik, C Frigeri VACUUM 0042-207X 1879-2715 2012 View on: MTMT: 1793995 | DOI: 10.1016/j.vacuum.2011.07.050 | WoS: 000301018400031 | Scopus: 84856544765