AlGaN/GaN heterostructure based 3-dimensional force sensors
Péter Lajos Neumann, János Radó, János Márk Bozorádi, János Volk MICRO AND NANO ENGINEERING 2590-0072 2023 View on: MTMT: 33836342 | DOI: 10.1016/j.mne.2023.100198 | REAL: 165698 | WoS: 001042684100001 | Scopus: 85159218400 | Google scholar: 15171049465387876833