Diffusion and reaction kinetics governing surface blistering in radio frequency sputtered hydrogenated a-SixGe1-x (0 ≤ x ≤ 1) thin films

Miklós Serényi, Attila Csik, András Hámori, Benjamin Kalas, István Endre Lukács, Zsolt Zolnai, C. Frigeri

THIN SOLID FILMS 0040-6090
2019

View on: MTMT: 30631637 | DOI: 10.1016/j.tsf.2019.04.007 | REAL: 93551 | WoS: 000466096600010 | Scopus: 85064263334 | Egyéb URL: https://linkinghub.elsevier.com/retrieve/pii/S0040609019301956 | Google scholar: 4660490898027765193