Effect of deuterium on passivation of Si surfaces

János Mizsei, Andrea Edit Csikósné Pap, Katalin Gillemot, Gábor Battistig

APPLIED SURFACE SCIENCE 0169-4332 1873-5584
2010

View on: MTMT: 1383087 | DOI: 10.1016/j.apsusc.2010.03.095 | WoS: 000278305300011 | Scopus: 77953134554 | Teljes dokumentum: http://mycite.omikk.bme.hu/doc/89014.pdf | Handle: 10890/1684 | Google scholar: 1899946900500290182 | Google scholar hash: hppswKP3XRoJ