Effects of the Focused Ion Beam parameters on nanopore milling in solid state membranes

Péter Fürjes, Zoltán Fekete, Levente Illés, Attila Lajos Tóth, Gábor Battistig, Ervin Róbert Gyurcsányi

PROCEDIA ENGINEERING 1877-7058
2012

View on: MTMT: 2179466 | DOI: 10.1016/j.proeng.2012.09.239 | WoS: 000312953300170 | Scopus: 84891678596