Interpretation of hydrogen incorporation into radio frequency sputtered amorphous silicon based on Berg modelling

Nikolett Hegedüs, Riku Lovics, Miklós Serényi, Zsolt Zolnai, Péter Petrik, Csaba Balázsi, Katalin Balázsi

VACUUM 0042-207X 1879-2715
2022

View on: MTMT: 32823205 | DOI: 10.1016/j.vacuum.2022.111164 | REAL: 142783 | WoS: 000805827500003 | Scopus: 85130157621 | Google scholar: 17448074534901538755