Multipulse irradiation of silicon by femtosecond laser pulses: Variation of surface morphology

Lugomer S, Maksimovic A, Farkas B, Zsolt Geretovszky, Tamás Szörényi, Attila Lajos Tóth, Zsolt Zolnai, István Bársony

APPLIED SURFACE SCIENCE 0169-4332 1873-5584
2012

View on: MTMT: 1860815 | DOI: 10.1016/j.apsusc.2011.11.121 | WoS: 000300185800040 | Scopus: 84856214486