S. Soleimani et al: Optimization of co‑sputtered CrxAl1−xN thin films for piezoelectric MEMS devices

April 28 2020: S. Soleimani et al: Optimization of co‑sputtered CrxAl1−xN thin films for piezoelectric MEMS devices published in Journal of Materials Science: Materials in Electronics 0957-4522 1573-482X

View on: MTMT: 31308883 | DOI: 10.1007/s10854-020-03260-7 | REAL: 108669 | WoS: 000529837900002 | Scopus: 85083968123