Structural study of MgO and Mg-doped ZnO thin films grown by atomic layer deposition

Ildikó Cora, Zsófia Baji, Zsolt Fogarassy, Zoltán Szabó, Béla Pécz

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 1369-8001
2019

View on: MTMT: 30364064 | DOI: 10.1016/j.mssp.2018.12.021 | REAL: 88901 | WoS: 000457727300002 | Scopus: 85059101019 | Google scholar: 6914618524322515525