Structure and morphology of aluminium doped Zinc oxide layers prepared by atomic layer deposition

Zsófia Baji, Zoltán Lábadi, Zsolt Endre Horváth, István Bársony

THIN SOLID FILMS 0040-6090
2012

View on: MTMT: 1808852 | DOI: 10.1016/j.tsf.2011.10.113 | WoS: 000304567900045 | Scopus: 84860315313