The effect of substrate bias on the piezoelectric properties of pulse DC magnetron sputtered AlN thin films

Khánh Nguyen Quoc, János Radó, Zsolt Endre Horváth, Saeedeh Soleimani, B. Oyunbolor, János Volk

JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS 0957-4522 1573-482X
2020

View on: MTMT: 31787835 | DOI: 10.1007/s10854-020-04810-9 | WoS: 000588873600002 | REAL: 118823 | Scopus: 85096023345 | Google scholar hash: b32mWr70w_IJ