Enhancing the nucleation in atomic layer deposition: A study on vanadium sulfide and oxide layers
Zsófia Baji, Zsolt Fogarassy, Orsolya Hakkel, Zoltán Szabó JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A-VACUUM SURFACES AND FILMS 0734-2101 1520-8559 2025 View on: MTMT: 35777180 | DOI: 10.1116/6.0004247 | REAL: 215862 | WoS: 001427094500001 | Scopus: 85218243310 | Google scholar: 553439264582111923
